From 97a92d50981ea555591ae4889f6730c41e789630 Mon Sep 17 00:00:00 2001 From: Tobias Reiter Date: Tue, 15 Oct 2024 15:40:47 +0200 Subject: [PATCH] Change Isotropic process default mask material and add SF6Etching wrapper --- python/pyWrap.cpp | 24 +++++++++++++++++++++++- 1 file changed, 23 insertions(+), 1 deletion(-) diff --git a/python/pyWrap.cpp b/python/pyWrap.cpp index b26f7165..d11635d4 100644 --- a/python/pyWrap.cpp +++ b/python/pyWrap.cpp @@ -680,6 +680,28 @@ PYBIND11_MODULE(VIENNAPS_MODULE_NAME, module) { .def("getParameters", &SF6O2Etching::getParameters, pybind11::return_value_policy::reference); + // SF6 Etching + pybind11::class_, SmartPointer>>( + module, "SF6Etching", processModel) + .def(pybind11::init<>()) + .def( + pybind11::init(&SmartPointer>::New< + const double /*ionFlux*/, const double /*etchantFlux*/, + const T /*meanIonEnergy*/, const T /*sigmaIonEnergy*/, + const T /*ionExponent*/, const T /*etchStopDepth*/>), + pybind11::arg("ionFlux"), pybind11::arg("etchantFlux"), + pybind11::arg("meanIonEnergy") = 100., + pybind11::arg("sigmaIonEnergy") = 10., + pybind11::arg("ionExponent") = 100., + pybind11::arg("etchStopDepth") = std::numeric_limits::lowest()) + .def( + pybind11::init( + &SmartPointer>::New &>), + pybind11::arg("parameters")) + .def("setParameters", &SF6Etching::setParameters) + .def("getParameters", &SF6Etching::getParameters, + pybind11::return_value_policy::reference); + // Fluorocarbon Parameters pybind11::class_::MaskType>( module, "FluorocarbonParametersMask") @@ -792,7 +814,7 @@ PYBIND11_MODULE(VIENNAPS_MODULE_NAME, module) { return SmartPointer>::New(rate, mask); }), pybind11::arg("rate") = 1., - pybind11::arg("maskMaterial") = Material::Mask) + pybind11::arg("maskMaterial") = Material::None) .def(pybind11::init([](const T rate, const std::vector mask) { return SmartPointer>::New(rate, mask); }),