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EMTMSM_Simulation_ComplexInterconnect.mac
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EMTMSM_Simulation_ComplexInterconnect.mac
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! Example of how to simulate a more complex interconnect structure
*DEL,job
*DIM,job,STRING,80
*DIM,geoname,STRING,80
job(1) = 'TM_in_signal_nets'
geoname(1) = 'TM_in_signal_nets'
/TITLE, 'TM_in_signal_nets'
/FILNAME, 'TM_in_signal_nets'
t_end=972000
t_ste=30
Run_ID = 1
length = 100
eff_r = 2.5
k_Cu = 399.0
k_ILD = 0.2
t_Cu = 1e-07
t_ILD = 1e-07
r = 0.9 ! Self-Healing
Z = 5
Qt = 0.5 ! heat of transport, eV
*DEL,time_array
*DIM,time_array,ARRAY,5
time_array(1) = 1, 0.01*t_end, 0.02*t_end, 0.08*t_end, t_end
/PREP7
ET,1,SOLID226,100111,,,,,1,1 ! structural-electric-thermal diffusion
SELTOL,1e-12
toff=273 ! TEMPERATURE OFFSET FROM ABSOLUTE ZERO, deg C
TOFFST,toff
MPTEMP,1,0,20,50,70,100,200 ! Temperatures for material parameter input (°C)
MPDATA,RSVX,1,1, eff_r*1.54E-08, eff_r*1.69E-08, eff_r*1.91E-08, eff_r*2.05E-08, eff_r*2.27E-08, eff_r*3E-08 ! temp-dependent RESISTIVITY rho, Ohm-m -> Cu
MP,DXX,1,7.8e-5 ! DIFFUSIVITY, m^2/s
MP,BETX,1,1 ! coef. of diffusion expansion for back stress
MP,CREF,1,1
MP,REFT,1,100 ! Reference Temperature
MP,EX,1,129.8e9 ! Young's modulus, Pa
MP,PRXY,1,0.34 ! Poisson's ratio
! MP,RSVX,1,eff_r*2.27E-08 ! RESISTIVITY rho, Ohm-m (no temperature dependency)
MP,KXX,1,k_Cu ! Thermal Conductivity
MP,C,1,382 ! Specific heat J/kg*K
Z_EM=(1-r)*Z ! Z decreased by self-healing
Ze=-Z_EM*1.6e-19 ! effective charge, C
kB=1.3806e-23 ! Boltzmann constant, m^2*kg/(s^2*degK)
Va=1.18e-29 ! atomic volume, m^3 Cu
k_eV=8.61733e-5 ! Boltzmann's constant, eV/K
Ea=0.6 ! Activation Energy, eV
! Migration Atoms
TB,MIGR,1
TBDATA,1,Ea/k_eV
TBDATA,2,Va/kB
tbdata,3,Qt/k_eV
TBDATA,4,Ze/kB
! 3D - Block
h=t_Cu ! HEIGHT, m
l=h*length ! LENGTH, m
w=h
BLOCK,0,l,0,w,0,h
Block,0.2*l,0.2*l+h,w,0.2*l,0,h
Block,0.6*l,0.6*l+h,-0.3*l,0,0,h
!VIAS
BLOCK,0,h,0,h,-h,0
BLOCK,0.2*l,0.2*l+h,0.2*l-h,0.2*l,-h,0
BLOCK,0.6*l,0.6*l+h,-0.3*l,-0.3*l+h,-h,0
BLOCK,l-h,l,0,h,-h,0
VSEL,ALL
VADD,ALL
ESIZE,h
VSEL,ALL
MSHKEY,0
MSHAPE,1,3D
VMESH,ALL
/VIEW,1,1,1,1
/VUP,1,Z
/ANGLE,1,180,ZM,0
EPLOT
/IMAGE,SAVE,'mesh_TM',png
ALLSEL
! Ground
NSEL,S,LOC,X,0.2*l,0.2*l+h
NSEL,R,LOC,Y,0.2*l-h,0.2*l
NSEL,R,LOC,Z,-h
D,ALL,VOLT,0
F,NDNEXT(0),AMPS,0.001
ALLSEL,ALL
! Current
NSEL,S,LOC,X,0,h
NSEL,R,LOC,Y,0,h
NSEL,R,LOC,Z,-h
CP,NEXT,VOLT,ALL
F,NDNEXT(0),AMPS,-0.0005
ALLSEL,ALL
NSEL,S,LOC,X,l-h,l
NSEL,R,LOC,Y,0,h
NSEL,R,LOC,Z,-h
CP,NEXT,VOLT,ALL
F,NDNEXT(0),AMPS,-0.0003
ALLSEL,ALL
NSEL,S,LOC,X,0.6*l,0.6*l+h
NSEL,R,LOC,Y,-0.3*l,-0.3*l+h
NSEL,R,LOC,Z,-h
CP,NEXT,VOLT,ALL
F,NDNEXT(0),AMPS,-0.0002
ALLSEL,ALL
! Temperatur
t=100 ! TEMPERATURE, deg C
ALLSEL,ALL
NSEL,S,LOC,Z,-h
D,ALL,TEMP,t ! constant temperature at via
ALLSEL,ALL
ASEL,S,LOC,Z,h
SFA,ALL,,CONV,k_ILD/t_ILD,100 ! convection to dielectric
! SFA,ALL,,CONV,1e20,100 ! use for TM deactivation
! Displacement
ALLSEL
D,ALL,UX,0
D,ALL,UY,0
D,ALL,UZ,0
FINISH
/SOLU
ANTYPE,TRANS
ALLSEL,ALL
IC,ALL,CONC,1
NSEL,ALL
NLGEOM,ON
OUTRES,ALL,ALL
AUTOTS,OFF
KEYW,pr_sgui,1 ! Disables Solution is done
TIME,t_end
NSUBST,t_ste
SOLVE
FINISH
!Number format
/GFORMAT,F,12,2
! White Background
/RGB,INDEX,100,100,100, 0
/RGB,INDEX, 80, 80, 80,13
/RGB,INDEX, 60, 60, 60,14
/RGB,INDEX, 0, 0, 0,15
!export all parameters to file.param
PARSAV,ALL,file,parm
!To smooth contour, make sure to start ansys in win32c
/CONTOUR,ALL,128
!Should display location number, but remove element border
/PNUM,LOC,1
! min max in plot
/PLOPTS,MINM,0
! x,y,z axis
/TRIAD,RBOT
FINISH
/POST1
/AXLAB,X,x (m)
/AXLAB,Y, Hydrostatic stress(Pa)
PATH,x_axis,2,,100
PPATH,1,,0,0,0
PPATH,2,,l,0,0
/XRANGE,0,l
/YRANGE,-400e6,400e6
/GROPT,DIVY,4
*DO, ti, 1, 5, 1
SET,,,,,time_array(ti)
color=ti*2+2
/COLOR,CURVE,color
PDEF,time_array(ti),NL,HPRES ,AVG
PLPATH,time_array(ti)
PAGET,datash,TABLE
! x, y, z, s, sh -> s...length, sh...stress_hydro
*MWRITE,datash,'sh_x_axis_%job(1)%_t%ti%_%time_array(ti)%_x_y_z_s_sh',txt
%15.10F %15.10F %15.10F %15.10F %15.2F
PDEF,time_array(ti),TEMP
PLPATH,time_array(ti)
PAGET,datatemp,TABLE
! x, y, z, s, sh -> s...length, sh...stress_hydro
*MWRITE,datatemp,'temp_x_axis_%job(1)%_t%ti%_%time_array(ti)%_x_y_z_s_sh',txt
%15.10F %15.10F %15.10F %15.10F %15.2F
PDEF,time_array(ti),VOLT
PLPATH,time_array(ti)
PAGET,datav,TABLE
! x, y, z, s, sh -> s...length, sh...stress_hydro
*MWRITE,datav,'v_x_axis_%job(1)%_t%ti%_%time_array(ti)%_x_y_z_s_sh',txt
%15.10F %15.10F %15.10F %15.10F %15.10F
!%15.2E %15.2E %15.2E %15.2E %15.2E -> Alternative to F must be right after
!mwrite-> no comment inbetween. E can represent 0 as 2.12E-21 due to rounding
! F is good because it rounds
/NOERASE
*ENDDO
/POST1
/SHOW,,,0,
/VIEW,1,1,1,1
/VUP,1,Z
/ANGLE,1,180,ZM,0
SET,LAST
PLNSOL,NL,HPRES
*GET,ParMax,PLNSOL,0,MAX
*GET,ParMin,PLNSOL,0,MIN
FINISH
NSEL,S,NL,HPRES,ParMax
*GET,XMAX,NODE,NDNEXT(0),LOC,X
*GET,YMAX,NODE,NDNEXT(0),LOC,Y
*GET,ZMAX,NODE,NDNEXT(0),LOC,Z
NSEL,S,NL,HPRES,ParMin,ParMin
*GET,XMIN,NODE,NDNEXT(0),LOC,X
*GET,YMIN,NODE,NDNEXT(0),LOC,Y
*GET,ZMIN,NODE,NDNEXT(0),LOC,Z
*CFOPEN,'%geoname(1)%_output',txt,,APPEND
*VWRITE, XMAX, YMAX, ZMAX
%15.13F %15.13F %15.13F
*VWRITE,ParMax
%15.2F
*VWRITE, XMIN, YMIN, ZMIN
%15.13F %15.13F %15.13F
*VWRITE,ParMin
%15.2F
*CFCLOS
!/CLEAR,NOSTART
/EOF